Retrospective sputter depth profiling using 3D mass spectral imaging
نویسندگان
چکیده
منابع مشابه
Retrospective sputter depth profiling using 3D mass spectral imaging.
A molecular multilayer stack composed of alternating Langmuir-Blodgett films was analyzed by ToF-SIMS imaging in combination with intermediate sputter erosion using a focused C60+ cluster ion beam. From the resulting dataset, depth profiles of any desired lateral portion of the analyzed field-of-view can be extracted in retrospect, allowing the influence of the gating area on the apparent depth...
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ژورنال
عنوان ژورنال: Surface and Interface Analysis
سال: 2010
ISSN: 0142-2421
DOI: 10.1002/sia.3509